Basic Nanofabrication Processes
Credits: 3
Department: MFT Manufacturing Technology
Subject: Manufacturing Technology
This course provides an overview of basic processing steps used in all applications of nanofabrication. Both top-down and bottom-up nanofabrication are included. The majority of the course details a step-by-step description of the equipment and processes needed to fabricate devices and structures such as bio-chips, Complementary Metal Oxide Semiconductor (CMOS) transistors, power devices, Microelectromechanical (MEM) devices and opt-electronic structures. Students learn the similarities and differences in both the equipment and process flows needed in the fabrication of these structures.
Corequisite: MFT-211