Materials Modification for Nanofabrication Applications
Credits: 3
Department: MFT Manufacturing Technology
Subject: Manufacturing Technology
This course covers the processing steps used in modifying material properties in nanofabrication. Included are applications of nano-scale devices and systems and the resulting material chemical, physical, biological or multiple-property requirements. Use of diffusion barriers, encapsulation, electromigration control, corrosion control, wettability, stress control and adhesion are studied.
Corequisite: MFT-216